A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

Meisam Heidarpour Roshan,Samira Zaliasl,Kimo Joo,Kamran Souri,Rajkumar Palwai,Lijun Will Chen,Amanpreet Singh,Sudhakar Pamarti,Nicholas Miller,Joseph C. Doll,Carl Arft,Sassan Tabatabaei,Carl Sechen,Aaron Partridge,Vinod Menon

J. Solid-State Circuits（2017）

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摘要

This paper presents a dual-microelectromechanical system (MEMS) resonator-based temperature sensor. In this sensor, the readout circuit estimates the temperature by measuring the frequency ratio of the two clocks generated by separate resonators with different temperature coefficients. The circuit is realized in a 0.18-μm CMOS process and achieves a resolution of 20 μK over a bandwidth of 100 Hz w...

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关键词

Temperature sensors,Oscillators,Clocks,Micromechanical devices,Resonant frequency,Frequency measurement,Temperature measurement

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