Electrowetting-On-Dielectric Actuation Of A Spatial And Angular Manipulation Mems Stage

We demonstrate a MEMS translational stage that uses electrowetting-on-dielectric (EWOD) as the actuating mechanism. Our EWOD stage is capable of linear translation with resolution of 10 mu m over a maximum range of 130 mu m and angular deflection of approximately +/- 1 degrees while eliminating solid-solid contact. The range and resolution can be readily improved via higher base contact angle and lower contact angle hysteresis as indicated by the detailed modeling accompanying the experimental demonstration.