Matching Properties of Femtofarad and Sub-Femtofarad MOM Capacitors.
IEEE Transactions on Circuits and Systems I: Regular Papers（2016）
摘要
Small metal-oxide-metal (MOM) capacitors are essential to energy-efficient mixed-signal integrated circuit design. However, only few reports discuss their matching properties based on large sets of measured data. In this paper, we report matching properties of femtofarad and sub-femtofarad MOM vertical-field parallel-plate capacitors and lateral-field fringing capacitors. We study the effect of bo...
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关键词
Capacitors,Method of moments,Capacitance,Capacitance measurement,Electrical resistance measurement,Frequency measurement,Measurement techniques
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