22.7 A 966-electrode neural probe with 384 configurable channels in 0.13µm SOI CMOS.

In vivo recording of neural action-potential (AP) and local-field-potential (LFP) signals requires the use of high-resolution penetrating probes. Driven by the need for large-scale recording and minimal tissue damage, a technology roadmap has been defined for next-generation probes aiming to maximize the number of recording sites while minimizing the probe dimensions [1]. In this paper we present a 384-channel configurable active neural probe for high-density recording which implements in situ buffering under each electrode to minimize the crosstalk between adjacent metal lines along the shank and other parasitic effects inherent to traditional passive probes [2]. Up to 966 selectable, neuron-sized electrodes (12×12µm2) were densely packed along a narrow (70µm) and thin (20µm) implantable shank using integrated CMOS. With twice the number of electrodes compared to state-of-the-art neural probes [2], our design achieves the highest electrode count in a single shank reported so far.