MEMS Closed-Loop Control Incorporating a Memristor as Feedback Sensing Element.

Sergio F. Almeida,José Mireles,Ernest J. Garcia,David Zubia

IEEE Transactions on Circuits and Systems II: Express Briefs（2016）

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摘要

In this brief, the integration of a memristor with a microelectromechanical systems (MEMS) parallel plate capacitor coupled by an amplification stage is simulated. It is shown that the MEMS upper plate position can be controlled up to 95% of the total gap. Due to its common operation principle, the change in the MEMS plate position can be interpreted by the change in the memristor resistance or me...

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关键词

Micromechanical devices,Memristors,Electrodes,Capacitors,Force,Resistance,Capacitance

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