Palladium contamination in silicon

M L Polignano,I Mica,Monica Ceresoli,Davide Codegoni, F Somaini, I Bianchi, D Volonghi

Solid-State Electronics（2015）

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摘要

•Palladium is characterized as a silicon contaminant.•Palladium is an effective recombination center.•SPV is the most effective method to reveal palladium contamination in silicon.•A calibration of SPV data in terms of palladium dose is provided.•Palladium segregation at the silicon surface was monitored SPV.

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关键词

Contamination,Silicon,Palladium,Carrier lifetime

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