A metallic glass grating for X-ray grating interferometers fabricated by imprinting

APPLIED PHYSICS EXPRESS(2014)

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摘要
In X-ray grating interferometry, the fabrication of thick transmission gratings with pitches of several micrometers has been a key subject. We report on a metallic glass imprinting technique for fabricating an interferometer grating. We successfully fabricated an 8-mu m-pitch, 10-mu m-thick grating (26 mm(2)) made of Pd42.5Ni7.5Cu30P20 metallic glass by using the technique, and as a demonstration we also performed X-ray phase imaging with the grating. The technique can be applied to fabricate not only X-ray but also neutron gratings potentially at high production rates and low costs and is expected to be widely used in the near future. (C) 2014 The Japan Society of Applied Physics
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