Atomic Layer Deposition of Lapo4 and Ca:Lapo4Henrik Hovde Sonsteby,Erik Ostreng,Helmer Fjellvag,Ola NilsenCHEMICAL VAPOR DEPOSITION(2014)引用 17|浏览9关键词ALD,Doping,LaPO4,QCMAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要