Surface Engineering of the Hydrogenated DLC (a-C:H) Coatings with Optimized Mechanical Performance

The aim of this contribution is to present the properties of the hydrogenated DLC (a-C:H) films and to study their growth carried out in a special deposition technique based on Gaseous Thermionic Vacuum Arc (G-TVA) method. The mechanical properties were investigated on cross-sectional samples using the Fischerscope HM 2000 depth sensing indentation (DSI) tester.