Generation of Uniform Diameter Micro-Bubbles Using a Piezo-Vibration Assisted Capillary Nozzle

In this study, we generated the uniform diameter micro-bubbles using a piezo-vibration assisted capillary nozzle for apply the nano/micro bubbles device use. The capillary nozzle (diameter: 35 mu m) was fabricated by FIB technique, and attached with piezo-device as micro bubbles generator. The fabricated piezo-nozzle showed inflective movement, whose displacement amount was about 3 mu m. Micro bubbles were not able to generate from capillary nozzle without piezo-vibration, while micro bubbles, whose diameter was in the range of 20 mu m to 21 mu m, could be generated from the capillary nozzle with piezo-vibration.