Multichannel HPD for high-speed single photon counting

We have developed a multichannel Hybrid Photo-Detector with fast time response, good timing resolution and low noise after a genuine signal (afterpulse). For this purpose, a prototype has been developed to encapsulate a newly designed multichannel avalanche diode with low capacitance, 3pF. The channel number is 32 in one chip, arranged as 2 lines of 16 pixels each 0.8 mm×0.8mm in size. The gain uniformity of one line (16 channels) is within 3%. The timing resolution is 114ps FWHM, including a pulse width of 77ps from the light source and a timing jitter of approximately 30ps from the measurement system. An afterpulse with extremely low probability has been confirmed under the delay of 180ns from the genuine signal, and it is a negligible value in most applications.