Deposition of CNx films using an expanding Ar/N2 plasma with a graphite nozzleA De Graaf, P D J Van Deurzen,M C M Van De Sanden, D C Schram,E Aldea,G DinescuElectronic Notes in Theoretical Computer Science(1999)引用 23|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要