A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface

Teimour Maleki,Girish Chitnis,Albert Kim,Babak Ziaie

Journal of Microelectromechanical Systems（2012）

引用 4|浏览4

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摘要

In this paper, we report on the first lasermicromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS lay...

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关键词

Actuators,Corrugated surfaces,Electrodes,Stress,Fabrication,Materials,Strain

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