A Planar Thin-Film Peltier Cooler for the Thermal Management of a Dew-Point Sensor System

The development of new application fields of microelectromechanical systems (MEMS) devices often implies a high degree of complexity and the integration of several functionalities within these devices. In this paper, thermoelectric planar thin-film microcoolers become more and more important due to their cooling and temperature stabilization ability, respectively, in MEMS devices. This paper repor...