A Fully Integrated Oven Controlled Microelectromechanical Oscillator—Part I: Design and Fabrication
Journal of Microelectromechanical Systems(2015)
摘要
This paper, the first of two parts, reports the design and fabrication of a fully integrated oven controlled microelectromechanical oscillator (OCMO). This paper begins by describing the limits on oscillator frequency stability imposed by the thermal drift and electronic properties (Q, resistance) of both the resonant tank circuit and feedback electronics required to form an electronic oscillator....
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关键词
Oscillators,Temperature sensors,Thermal stability,Aluminum nitride,Ovens,Resonant frequency,III-V semiconductor materials
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