A high-temperature unit for the ion collector of the ИЛУ-3 accelerator

The design of the multiposition high-temperature unit for the ion collector of the ИЛУ-3 accelerator with an operating range up to 1000°C is described. The unit is intended to sequentially implant up to four samples at a stabilized temperature without devacuumization of the accelerator chamber. The temperature of the target was calculated in the process of implantation with consideration for the contact and radiation heat exchanges. The effect of implantation conditions and modes on the equilibrium target temperature is shown.