Parametric excitation of silicon-on-insulator microcantilever beams by fringing fields probed with laser Doppler vibrometery

B Ilic,Slava Krylov,Yoav Linzon,Said M Mahajna

Sensors（2013）

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摘要

Large amplitude flexural vibrations were excited in single layer silicon-on-insulator micromechanical cantilever beams in ambient air, driven by symmetrical actuating electrodes around grounded cantilevers and characterized optically with a laser Doppler vibrometer under ambient conditions.

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