Study on grinding of LiTaO 3 wafer using effective cooling and electrolyte solution

Wei Hang,Libo Zhou,Kehua Zhang,Jun Shimizu,Julong Yuan

Precision Engineering（2016）

引用 12|浏览16

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摘要

•Joint effects of piezoelectrics and pyroelectrics possibly generate cracks in grinding.•The coolant temperature and wheel tooth geometry are two main factors dominating the performance of LT wafer grinding.•Effective cooling and electrolyte solution make it possible to thin LT wafers less than 100μm.

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关键词

LiTaO3 wafer,Piezoelectric effect,Pyroelectric effect,Polarization,Internal stress,Grinding,Effective cooling,Electrolyte solution

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