Core–shell structured polystyrene coated silica composite abrasives with homogeneous shells: The effects of polishing pressure and particle size on oxide-CMP

•The PS coated silica abrasives with homogeneous shells and tunable size were obtained.•The PS coated silica abrasives showed superior polishing performance for SiO2 film.•The surface roughness and material removal rate increased as the core size increased.•The polishing results were rationalized according to the indentation-based mechanism.