Integrated films of transition metal oxides for information technology

Alexander A Demkov,Patrick Ponath,Kurt Fredrickson,Agham B Posadas,Martin D Mcdaniel,Thong Q Ngo,John G Ekerdt

Microelectronic Engineering（2015）

引用 12|浏览5

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摘要

•High crystallinity ferroelectric BaTiO3 with out of plane polarization integrated on Si by MBE.•High crystallinity ferroelectric BaTiO3 with in plane and out of plane polarization integrated on Ge by MBE.•High crystallinity SrTiO3 is grown on Si and Ge by low temperature ALD.•High crystallinity BaTiO3 is grown on Si by ALD.

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关键词

Ferroelectrics,Monolithic integration,MBE,ALD,Density functional theory

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