Comparison of epoxy- and siloxane-based single-mode optical waveguides defined by direct-write lithography

•Single-mode polymer waveguides were fabricated by DWL using two commercial polymers.•The simulations were performed to calculate the required single-mode dimensions.•The cut-back measurements were performed both at 1.31µm and 1.55µm.•The siloxane waveguides showed lower propagation losses than the epoxy waveguides.•The proposed technology targets short-reach interposer-level optical interconnects (chip to chip or SOI chip to SMF).