BRIEF COMMUNICATION: Electrothermal bistability tuning in a large displacement micro actuator
Journal of Micromechanics and Microengineering（2010）
关键词
finite element model,optical switch,silicon on insulator
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要