Deposition and characterization of single magnetron deposited Fe:SnO x coatings

Coatings deposited by magnetron co-sputtering from a single RF magnetron with a ceramic SnO2 target with iron inset in argon plasma were studied. The mass spectra of the process identified Sn+ and SnO+ species as the dominant species sputtered from the target, but no SnO2+ species were detected. The dominant positive ions in argon plasma are Ar+ species. The only detected negative ions were O−. Sputtered neutral tin related species were not detected. Iron related species were also not detected because their concentration is below the detection limit.