Error mapping of high-speed AFM systems

In recent years, there have been several advances in the development of high-speed atomic force microscopes (HSAFMs) to obtain images with nanometre vertical and lateral resolution at frame rates in excess of 1 fps. To date, these instruments are lacking in metrology for their lateral scan axes; however, by imaging a series of two-dimensional lateral calibration standards, it has been possible to obtain information about the errors associated with these HSAFM scan axes. Results from initial measurements are presented in this paper and show that the scan speed needs to be taken into account when performing a calibration as it can lead to positioning errors of up to 3%.