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Fabrication of transferrable, fully suspended silicon photonic crystal nanomembranes exhibiting vivid structural color and high-Q guided resonance
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, no. 5 (2013)
Abstract
The authors report the fabrication and optical characterization of fully suspended, transferrable, and deflectable silicon photonic crystal nanomembranes. Starting with a silicon-on-insulator wafer, the authors used electron beam lithography and inductively coupled plasma reactive ion etching (ICP-RIE) to introduce various photonic crysta...More
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