Design and Fabrication of a Metallic Nanostamp Using UV Nanoimprinting and Electroforming for Replicating Discrete Track Media with Feature Size of 35 Nm

Journal of Vacuum Science &amp Technology B, Nanotechnology and Microelectronics Materials, Processing, Measurement, and Phenomena（2012）

引用 1|浏览6

关键词

Nanoimprint Technology,Nanolithography Techniques,Nanolithography,Nanofabrication,Microcontact Printing

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要