Importance of layer thermal conductivity on the sharpness of patterns produced by laser interference
Applied Surface Science(2016)
摘要
•Temperature profile matches laser intensity profile in poor thermally conducting layers.•Patterns produced in poor thermally conducting layers have sharp interfaces.•Lateral heat flow smears the temperature profile in thermally conducting layers.•Both liquid and solid state dewetting occurs upon patterning thermally conducting layers.•The thermal conductivity of layers limits the minimum period achievable.
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关键词
Laser interference,Metal layers,Thermal conductivity,Nanoparticles,Dewetting
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