Generation of nanoparticles at a fluence less than the ablation threshold using femtosecond laser pulses

Go Odachi, Ryosuke Sakamoto,Kento Hara,Takashi Yagi

Applied Surface Science（2013）

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摘要

•Nanopillars grow on the wall of the hole formed by the femtosecond laser on c-Si.•Nanoparticles grow on the surface irradiated by less than the ablation threshold.•The pillars and particles become part of debris in the laser ablation.

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关键词

Femtosecond laser,Micromachining,Debris,Silicon,Nanoparticle,Solid state crystallization,Non-thermal phase transition

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