Thin films composed of Ag nanoclusters dispersed in TiO 2 : Influence of composition and thermal annealing on the microstructure and physical responses

Applied Surface Science(2015)

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摘要
•Ag:TiO2 films were produced by magnetron sputtering and post-deposition annealing.•The Ag concentration in the films was increased with the Ag pellets area.•Thermal annealing induced microstructural changes in the films.•Optical and thermal properties were correlated with the structure and morphology.
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关键词
Thin films,Ag clusters dispersed in TiO2,Localised surface plasmon resonance,Thermal behaviour
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