Compositional, morphological and mechanical investigations of monolayer type coatings obtained by standard and reactive magnetron sputtering from Ti, TiB 2 and WC

Victor V Jinga,Alexandru Mateescu,D Cristea,George Daniel Mateescu, I Burducea, Clara Ionescu,L S Crăciun,I Ghiuţă,Cornel Samoilă,D Ursuţiu,D Munteanu

Applied Surface Science（2015）

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摘要

•Thin films have been obtained by simultaneous sputtering from Ti, TiB2, and WC targets.•The films are nonstoichiometric, with hardness values between 20 and 22GPa.•The friction coefficients for the (film – 100Cr6 steel) system are 0.18 and 0.23.•The films show promising wear resistance, if paired with appropriate substrates.

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关键词

Magnetron sputtering,Wear resistant coatings,Nanocomposite

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