Gasket Made of Nickel Material for ConFlat Type Flanges

Recently, application processes of a vacuum system in which corrosive chemicals attack the copper material are rapidly spread. For use in these processes, nickel can be recognized to be a promising candidate of gasket material for ConFlat type sealing system, instead of conventional copper gasket. We produced some versions of nickel gasket, and tested these gaskets to investigate their seal properties. In course of the experiments, we found that fine scratches and nicks on faces of the nickel gaskets were hardly disappeared during the sealing face is formed, and tend to remain on the sealing face as leak paths. The last version of the test gasket of which faces were formed to prevent from any injury showed a good seal properties, particularly in baking process.