Selective Epitaxial Si:P Film for nMOSFET Application: High Phosphorous Concentration and High Tensile Strain Shaoli Chu, Yungi Kim, Seema Sharma,Zhiyuan Ye, Alok Dube, Xifeng Limag(2014)引用 46|浏览0暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要