A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave SensorChiyuan Lee,Yingchou Cheng,Tsungtsong Wu,Yungyu Chen,Wenjong Chen,Shihyung Pao,Peizen Chang,Pinghei Chen, Kaihsiang Yen,Fuyuan Xiaomag(2004)引用 24|浏览6暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要