SELF-ALIGNED DIELECTRIC ISOLATION FOR FINFET DEVICESMarc A Bergendahl,Kangguo Cheng, David V Horak,Ali Khakifirooz,Shom Ponoth,Theodorus E Standaert,Chihchao Yang,Charles W Koburger, X Cai,Ruilong Xiemag(2015)引用 27|浏览14暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络