Selective-area-growth technology for flexible active building blocks

H Debregeas,J Decobert,N Lagay, R Guillamet,D Carrara, O Patard,C Kazmierski,R Brenot

Integrated Photonics Research, Silicon and Nanophotonics（2012）

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摘要

Selective area growth enables to locally tune the epitaxial material thickness and composition on a single InP substrate. This paper presents this technology and its application to photonic integrated circuits, illustrated by two realisations.

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关键词

photonic integrated circuits

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