Microscanner using self aligned vertical comb drives in a switched electrode configuration for large static rotation

John Fritz,Shlomit S Pinter,Christoph Friese,Tjalf Pirk,Hanspieter Seidel

international conference on optical mems and nanophotonics（2009）

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摘要

We present a microscanner actuated by self aligned vertical comb drives of high aspect ratio, designed for bidirectional static actuation. A stable rotational angle of ±8° is demonstrated at 290V DC .

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关键词

electrostatics,microscanner,actuators,electrodes,high aspect ratio

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