Production of device e.g. ferroelectric random access memory comprises forming substrate, passivating region and/or surface region with a complementary metal oxide semiconductor structure and contacting with capacitor arrangements

Bruchhaus Rainer, Enders Gerhard, Hartner Walter, Kasko Igor, Kroenke Matthias,Mikolajick Thomas, Nagel Nicolas, Roehner Michael, Weinrich Volker

mag(2003)

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