Electrostatic MEMS energy harvester utilizing vibration in the vertical direction Boram Hwang, Jaehwan Lim,Changkyu Kimmag(2012)引用 23|浏览7暂无评分关键词mems,vertical direction,vibration,electrostaticAI 理解论文溯源树样例生成溯源树,研究论文发展脉络