Out-of-Plane and In-Plane Crystalline Orientations of Oxide Heterostructures of LSMO/ZnO

MRS Online Proceedings Library(2012)

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摘要
Hexagonal ZnO was grown on hexagonal (001) sapphire substrate, then cubic La(Sr)MnO 3 (LSMO) was grown on ZnO underlayer by ion beam sputtering at substrate temperatures of 550-750°C to obtain double-layer of LSMO/ZnO. Out-of-plane (001) oriented ZnO was grown with in-plane orientation of [10-10](0001)ZnO//[11-20](0001)sapphire. Mixed phase of LSMO with out-of-plane (001), (110) and (111) orientations was grown on (001) ZnO usually. However each single phase of LSMO could be grown by controlling deposition conditions. The LSMO grains have their in-plane orientations of [110](110)LSMO //[10-10](0001)ZnO and [110](111)LSMO//[11-20](0001)ZnO.
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关键词
sputtering,thin film
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