MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACITOR TRIMMING THEREOF AND DESIGN STRUCTURESChristopher V Jahnes, Anthony K Stampermag(2013)引用 23|浏览4暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要