OPPORTUNISTIC PLACEMENT OF IC TEST STRUCUTRES AND/OR E-BEAM TARGET PADS IN AREAS OTHERWISE USED FOR FILLER CELLS, TAP CELLS, DECAP CELLS, SCRIBE LINES, AND/OR DUMMY FILL, AS WELL AS PRODUCT IC CHIPS CONTAINING SAME

Indranil De,Dennis Ciplickas,Stephen Lam, Jonathan Haigh,Vyacheslav Rovner, Christopher P Hess, Tomasz W Brozek,Andrzej J Strojwas,Kelvin Yihyuh Doong,John K Kibarian,Sherry F Lee, Kimon Michaels, Marcin A Strojwas, Conor Osullivan, Mehul Jain

mag(2015)

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