Method for bilayer HDP CVD / PE CVD cap in advanced BEOL interconnect structures
Tzechiang Chen, Engel Brett H C, I P O Ibm United Kingdom Ltd,John A Fitzsimmons,Terence Kane,Naftali E Lustig, Mcdonald Ann C,Vincent Mcgahay,Sooncheon Seo, Anthony K Stamper,Y Y Wang,Erdem Kaltalioglu mag(2011)
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