Frequency-Dependent Crosstalk Modeling For On-Chip Interconnections

An extensive study of crosstalk simulation issues for on-chip interconnections was performed for representative six-layer Al(Cu) structures. Guidelines are given for the range of conditions when R(f)L(f)C vs RLC vs RC representations are valid. Examples are also given of realistic short and long coupled-section interactions and the effect of in-plane neighboring connections is discussed. Signal propagation and crosstalk are analyzed over the temperature range -160 degrees C to +100 degrees C and it is shown that Al(Cu) wiring can sustain 4.44 GHz processor frequency at T = +25 degrees C operation.