Mems-Based Capacitive Pressure Sensors with Pre-Stressed Sensing Diaphragms
2015 IEEE SENSORS（2015）
Key words
MEMS-based capacitive pressure sensors,pre-stressed sensing diaphragms,linear response,touch-mode sensor,compressive residual stress,insulated counter electrodes,finite element method,surface micromachining,low pressure chemical vapor deposition,pressure cavity,dielectric insulation layer,full scale nonlinearity,Si
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