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Study of Local Anodic Oxidation Regimes in MoSe2

Bogdan R. Borodin,Fedor A. Benimetskiy,Prokhor A. Alekseev

Nanotechnology（2021）

Cited 6|Views32
Key words
MoSe2,probe lithography,local anodic oxidation,nanopatterning,anisotropy,TMDC
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