Parametral Dependence Of Bilevel-Interconnect Formation In Gaas Ics/Mmics
MICROELECTRONIC DEVICE AND MULTILEVEL INTERCONNECTION TECHNOLOGY（1995）
关键词
adhesion, dielectric, interconnects, silicon nitride, GaAs, MMIC, IC, bonding
AI 理解论文
溯源树
样例
生成溯源树，研究论文发展脉络
Chat Paper
正在生成论文摘要