High Power Laser-Sustained Plasma Lightsources For Kla-Tencor Broadband Inspection Tools

Ilya Bezel,Gil Delgado,Matthew Derstine,Kenneth C Gross,Richard W Solarz, Anatoly Shchemelinin, David W Shortt

2015 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2015）

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摘要

For the last 8 years, the brightness of UV lightsources in KT Broadband inspection tools increased by orders of magnitude due to advances in LSP technology. Challenges of LSP in high-power regime are discussed here.

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关键词

lasers,inspection,brightness,plasmas,optical pumping

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