Subtle role played by H in Si thin-film growth from radicals: key atomic-scale mechanisms revealed by DFT calculations

Bulletin of the American Physical Society(2008)

引用 23|浏览4
暂无评分
关键词
thin film
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要