Effects of Deuterium Implantation Dose on Hardness and Deuterium Desorption

High entropy TiVZrNbHf and TiVZrNbHfN coatings prepared by filtered vacuum arc plasma from a single equiatomic HEA cathode. Similarly were obtained titanium and titanium nitride coatings. The structure of coatings was investigated by X-ray analysis and the changes in nanohardness by nanoindentation method. The effusion of the implanted deuterium was studied by thermal desorption spectroscopy (TDS). It is shown that the structure of effusion spectrum is a function of deuterium dose. With increasing implantation dose deuterium desorption temperature range from coatings is expanding in the direction of lowering the temperature and the temperature of the peak maximum gas emission gradually shifts to lower temperatures. For nitride coatings deuterium desorption starts at about room temperature and the maximum rate of desorption at a temperature of ~500 K. When irradiation doses more than 5×1017 D/cm2 hardness of nitride coatings decreased by half. Hardness reduction of coatings is caused by occurrence hydride structural formations in coatings.