Effects of Tris(tert-pentoxy)silanol Purge Time on SiO2 Thin-Film Growth Rate in Rapid Atomic Layer Deposition Soyoung Park,Jung Ran Kim,Hae Jin Kim,Jeongyun Heo,Bong Seob Yang,Seung Won Suh,Yong Jun Choi, Heuiseok Limmag(2013)引用 26|浏览9暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要